Impermeable cooled closing plug for processing tubes, in particular in semiconductor manufacture
US4318889A · kind A · utility
6Cited by
3References
6Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 6, 1980 |
| Grant date | Mar 9, 1982 |
| Priority date | — |
| Expiry date | Nov 6, 2000 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01J2219/00085
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An impermeable cooled closing plug adapted for closing the end of a semiconductor manufacture processing tube is made of a material selected from the group consisting of quartz, silicon and silicon carbide, which materials have low heat conductivity and high chemical stability. The cooling effects of a cooling liquid supplied to the entrance flange of a processing tube are isolated from the tube closing plug by virtue of the low heat conductivity, thus preventing unwanted condensation effects at the entrance of the tube.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.