Pressure transducer
US4321578A · kind A · utility
19Cited by
16References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 3, 1979 |
| Grant date | Mar 23, 1982 |
| Priority date | — |
| Expiry date | Oct 3, 1999 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/0038
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure transducer is arranged to mount a semiconductor pressure sensor in a housing such that the pressure of a high-pressure fluid is applied to one side of the semiconductor pressure sensor through a high pressure seal diaphragm and a sealed liquid in the high pressure side, while the pressure of a low-pressure fluid is applied to the other side of the sensor through a low-pressure seal diaphragm and a sealed liquid in the low pressure side, and a protecting member is provided closer to the low-pressure seal diaphragm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.