Patent · US Expired

Phase shifting mirror

US4322130A · kind A · utility

26Cited by
1References
8Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 26, 1979
Grant dateMar 30, 1982
Priority date
Expiry dateSep 26, 1999

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B27/288
  • WIPO fieldMaterials, metallurgy
  • WIPO sectorChemistry

Abstract

A phase shifting mirror comprising a thin film layer of metal provided on a substrate, and a thin film layer of dielectric material provided on said thin film layer of metal, wherein by utilization of a phase difference between a P-polarization reflected component and an S-polarization reflected component resulting from the reflection on the boundary surface between the layer of metal and the layer of dielectric material and variations in refractive index and film thickness of the dielectric material, a desired phase difference is obtained between the P-polarization reflected component and the S-polarization reflected component.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.