Patent · US Expired

Optical waveguide formed by diffusing metal into substrate

US4329016A · kind A · utility

16Cited by
15References
1Claims
0Family size

Assignee

Inventor

Key dates

Filing dateSep 24, 1979
Grant dateMay 11, 1982
Priority date
Expiry dateSep 24, 1999

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC30B31/02
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

The specification describes an optical waveguide device formed by diffusing a metal into a substrate which may be either a semiconductor material or a dielectric material. The substrate is first coated with a liquid composition comprising organo-metallic solutions of the desired metal and silica. The coated substrate is then heated at an elevated temperature for a period of time sufficient to cause the organic portion of the solution to decompose, thereby leaving a composite film comprising an oxide of the desired metal and SiO.sub.2. Upon further heating, the metal from the metal oxide diffuses into the substrate. The residual composite film may be left in place or removed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.