Method for measurement of distribution of inclusions in a slab by electron beam irradiation
US4331872A · kind A · utility
5Cited by
5References
7Claims
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Key dates
| Filing date | Jun 17, 1980 |
| Grant date | May 25, 1982 |
| Priority date | — |
| Expiry date | Jun 17, 2000 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N23/2252
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In a method for the measurement of the distribution of the inclusions in a slab by electron beam irradiation, an electron beam of relatively large diameter is irradiated onto a relatively large specimen of the slab and a spectrum analysis of the characteristic X-rays is effected by using planar analyzing crystals, in order to obtain the data of the two-dimensional distribution of the elements of the inclusions in the surface of the specimen.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.