Method for continuous production of niobium-germanium layers on a substrate
US4336280A · kind A · utility
6Cited by
5References
8Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 4, 1980 |
| Grant date | Jun 22, 1982 |
| Priority date | — |
| Expiry date | Nov 4, 2000 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S505/821
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method for producing layers of niobium-germanium on a continuous substrate. The layers are produced in a reaction chamber by the reduction of Nb and Ge which are halogenized by H.sub.2 on the substrate which is heated. Uniform high current density of the Nb.sub.3 Ge layers throughout the length of the substrate is insured by the addition of a small amount of water vapor which is admixed, in accordance with the invention, to a reaction gas mixture containing H.sub.2 gas and Nb and Ge halogenides. The content of water vapor in the reaction gas is maintained between 0.05 and 0.001 volume percent.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.