Patent · US Expired

High frequency inductive generator for the inductive coil of a plasma generator

US4337415A · kind A · utility

17Cited by
2References
3Claims
0Family size

Assignee

Inventor

Key dates

Filing dateJun 30, 1980
Grant dateJun 29, 1982
Priority date
Expiry dateJun 30, 2000

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH05H1/46
  • WIPO fieldChemical engineering
  • WIPO sectorChemistry

Abstract

High frequency inductive generator for the inductive coil of a plasma generator constituted by a head for inflow of gas into an inductive coil. The high frequency generator has a quarter wave anode resonant line oscillator circuit and a coupling circuit connected to the inductive coil. The quarter wave anode circuit is controlled from a single oscillator tube. One of the lines is connected to the anode of the tube, while the other is coupled exteriorly by capacitive coupling. The invention is used for analysis by emission spectrometry.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.