High frequency inductive generator for the inductive coil of a plasma generator
US4337415A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jun 30, 1980 |
| Grant date | Jun 29, 1982 |
| Priority date | — |
| Expiry date | Jun 30, 2000 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/46
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
High frequency inductive generator for the inductive coil of a plasma generator constituted by a head for inflow of gas into an inductive coil. The high frequency generator has a quarter wave anode resonant line oscillator circuit and a coupling circuit connected to the inductive coil. The quarter wave anode circuit is controlled from a single oscillator tube. One of the lines is connected to the anode of the tube, while the other is coupled exteriorly by capacitive coupling. The invention is used for analysis by emission spectrometry.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.