Heating method for silane pyrolysis reactor
US4341749A · kind A · utility
17Cited by
6References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 14, 1981 |
| Grant date | Jul 27, 1982 |
| Priority date | — |
| Expiry date | Aug 14, 2001 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01B33/029
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
An improved method for the pyrolysis of silane in a free-space reactor. The improved method involves non-uniform heat input along the axial length of a free-space silane pyrolysis reactor so that the axial temperature profile along the length of the surrounding reactor wall is essentially constant.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.