Method for making planar optical waveguide comprising thin metal oxide film incorporating a relief phase grating
US4343890A · kind A · utility
30Cited by
6References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 27, 1980 |
| Grant date | Aug 10, 1982 |
| Priority date | — |
| Expiry date | Mar 27, 2000 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/34
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Enhanced optical coupling by phase evanescent fields is achieved by covering the planar layer of a waveguide with a thin metal oxide film incorporating a relief phase grating. The grating is originally formed in a metallic film covering the planar layer, which metallic film is converted to a metal oxide film by heating in an oxygen-containing atmosphere.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.