Process for producing a semiconductor device
US4348802A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Apr 11, 1980 |
| Grant date | Sep 14, 1982 |
| Priority date | — |
| Expiry date | Apr 11, 2000 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
In a process for producing a semiconductor device, particularly an MIS structure semiconductor device, an electrode, which is in ohmic contact with the semiconductor substrate, is usually formed on the surface which is opposite to the surface having MIS FETs. However, in a recently developed process, the electrode mentioned above is formed on the semiconductor substrate surface on which the MIS FETs are formed, and the electrode is in ohmic contact with the substrate through a short-circuit of a PN junction formed on such semiconductor substrate surface. However, a so formed electrode is liable to break. In the present invention, wherein a masking layer covers the substrate-contact region during the production of the MIS FETs, the electrode mentioned above is in an ohmic contact with the electrode not through the PN junction and the problem of breaking occurs seldom.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.