Transparent conductive films and methods of producing same
US4349425A · kind A · utility
20Cited by
5References
11Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Aug 23, 1978 |
| Grant date | Sep 14, 1982 |
| Priority date | — |
| Expiry date | Aug 23, 1998 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01B1/08
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Cadmium-tin oxide films are prepared by d-c reactive sputtering of Cd-Sn alloys in Ar-O.sub.2 mixtures. The films obtained have low resistivity of the order of 10.sup.-3 -10.sup.-4 .OMEGA.-cm and high optical transparency depending upon deposition conditions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.