Single gas flow elevated pressure reactor
US4351805A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 6, 1981 |
| Grant date | Sep 28, 1982 |
| Priority date | — |
| Expiry date | Apr 6, 2001 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B33/005
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An elevated pressure reactor apparatus for oxidizing or annealing specimens of the type including a reaction tube for containing the specimen surrounded by a heating furnace and enclosed in a pressure chamber, the apparatus incorporating a unique single gas flow feature, an improved multi-element furnace structure, a retrograde closure for the reaction tube to prevent gas flow back from the pressure chamber, a magnetically connected driving mechanism for a specimen support boat, and concentric gas entrance and exit tubes wherein exiting gas pre-heats the entering gas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.