Patent · US Expired

Single gas flow elevated pressure reactor

US4351805A · kind A · utility

17Cited by
10References
5Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 6, 1981
Grant dateSep 28, 1982
Priority date
Expiry dateApr 6, 2001

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC30B33/005
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

An elevated pressure reactor apparatus for oxidizing or annealing specimens of the type including a reaction tube for containing the specimen surrounded by a heating furnace and enclosed in a pressure chamber, the apparatus incorporating a unique single gas flow feature, an improved multi-element furnace structure, a retrograde closure for the reaction tube to prevent gas flow back from the pressure chamber, a magnetically connected driving mechanism for a specimen support boat, and concentric gas entrance and exit tubes wherein exiting gas pre-heats the entering gas.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.