Double crucible Czochralski crystal growth apparatus
US4352784A · kind A · utility
16Cited by
8References
5Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 25, 1979 |
| Grant date | Oct 5, 1982 |
| Priority date | — |
| Expiry date | May 25, 1999 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T117/1052
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An apparatus useful for double crucible Czochralski crystal growth comprises an inner crucible fixed within an outer crucible wherein the inner crucible contains an extra volume or reservoir of semiconductor melt when flow of semiconductor melt from the outer crucible into the inner crucible through means interconnecting the crucibles ceases.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.