Patent · US Expired

High resolution two-layer resists

US4352870A · kind A · utility

17Cited by

4References

9Claims

0Family size

Assignee

Bell Telephone Laboratories, Inc. · US

Inventors

Richard E. Howard · Pleasanton, US
Evelyn L. Hu · Cambridge, US
Lawrence David Jackel · Holmdel, US

Key dates

Filing date	Mar 27, 1981
Grant date	Oct 5, 1982
Priority date	—
Expiry date	Mar 27, 2001

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/095
WIPO fieldOptics
WIPO sectorInstruments

Abstract

The use of a specific two-layer resist composition with a more sensitive and thicker resist as the lower layer allows the production of lines on the order of 400 A in width separated by spaces on the order of 400 A.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.