Detector array module-structure and fabrication
US4354107A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 14, 1980 |
| Grant date | Oct 12, 1982 |
| Priority date | — |
| Expiry date | Nov 14, 2000 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K2201/0919
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A photo-detector array module is disclosed wherein: (a) the focal plane array of photo-detectors is in electrical contact with thin film conductors supported on thin ceramic layers extending perpendicular to the focal plane, and (b) sub-module structures, each composed of such layers, have complementary shapes (such as "O-shaped" and "I-shaped") to provide "component wells" for electronics within the three dimensional space defined at one end by the two-dimensional area of the focal plane. In order to fabricate such a module satisfactorily, a method is disclosed in which each unimaged layer (i.e., layer whereon the thin film conductors have not yet been photodelineated) is individually laminated to the prior structure, and the photo-delineation process on the unimaged layer includes an optical alignment step to insure alignment of the thin film conductors on each layer with those on preceding layers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.