Humidity sensor with electrical rejection of contaminants
US4356150A · kind A · utility
5Cited by
8References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 15, 1981 |
| Grant date | Oct 26, 1982 |
| Priority date | — |
| Expiry date | May 15, 2001 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R27/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A conductivity type thin film humidity sensor on a silicon chip which sensor includes structure which electrically shields the sensing area from highly dissociative contaminants.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.