Apparatus and method for monitoring the intensities of charged particle beams
US4357536A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 16, 1981 |
| Grant date | Nov 2, 1982 |
| Priority date | — |
| Expiry date | Jan 16, 2001 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01T1/29
- WIPO fieldEnvironmental technology
- WIPO sectorChemistry
Abstract
Charged particle beam monitoring means (40) are disposed in the path of a charged particle beam (44) in an experimental device (10). The monitoring means comprise a beam monitoring component (42) which is operable to prevent passage of a portion of beam (44), while concomitantly permitting passage of another portion thereof (46) for incidence in an experimental chamber (18), and providing a signal (I.sub.m) indicative of the intensity of the beam portion which is not passed. Calibration means (36) are disposed in the experimental chamber in the path of the said another beam portion and are operable to provide a signal (I.sub.f) indicative of the intensity thereof. Means (41 and 43) are provided to determine the ratio (R) between said signals whereby, after suitable calibration, the calibration means may be removed from the experimental chamber and the intensity of the said another beam portion determined by monitoring of the monitoring means signal, per se.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.