Synchronized voltage contrast display analysis system
US4358732A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 22, 1980 |
| Grant date | Nov 9, 1982 |
| Priority date | — |
| Expiry date | Aug 22, 2000 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/305
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus and method for comparing internal voltage potentials of first and second operating electronic components such as large scale integrated circuits (LSI's) in which voltage differentials are visually identified via an appropriate display means. More particularly, in a first embodiment of the invention a first and second scanning electron microscope (SEM) are configured to scan a first and second operating electronic component respectively. The scan pattern of the second SEM is synchronized to that of the first SEM so that both simultaneously scan corresponding portions of the two operating electronic components. Video signals from each SEM corresponding to secondary electron signals generated as a result of a primary electron beam intersecting each operating electronic component in accordance with a predetermined scan pattern are provided to a video mixer and color encoder. Each video signal is encoded in accordance with a different primary color, a composite signal thereof being provided to a color TV monitor. If corresponding portions of the two video signals have the same voltage potential, one color will appear on the TV monitor. If they are different, then other colo…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.