Capacitive pressure sensor
US4358814A · kind A · utility
65Cited by
4References
35Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 27, 1980 |
| Grant date | Nov 9, 1982 |
| Priority date | — |
| Expiry date | Oct 27, 2000 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0072
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A capacitive pressure sensor including a concave base member coupled to a central base support. The base member has a flange extending from its rim having a substantially planar surface. A conductive, deformable diaphragm is stretched across the flange and held by a clamping ring having a surface complementary to the flange. A substantially planar electrode is positioned substantially parallel to and displaced by a predetermined distance from the diaphragm by an electrode support member coupled to the central base support.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.