Method of formation of a blazed grating
US4359373A · kind A · utility
3Cited by
9References
5Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 15, 1981 |
| Grant date | Nov 16, 1982 |
| Priority date | — |
| Expiry date | Jun 15, 2001 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/001
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of forming a blazed grating in a surface of a body comprising the steps of forming a patterned layer having a grating therein overlying the surface of the body, non-uniformly coating the surface of the grating with a masking layer and exposing the non-uniformly coated surface to a material removal means which preferentially removes the patterned layer where it is uncoated and the surface of the body producing an asymmetric groove pattern in the surface of the body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.