Edge barrier of polysilicon and metal for integrated circuit chips
US4364078A · kind A · utility
26Cited by
3References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 16, 1980 |
| Grant date | Dec 14, 1982 |
| Priority date | — |
| Expiry date | May 16, 2000 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An aluminum over silicon barrier extends over the lateral edges of an integrated circuit chip into adjacent scribe lines forming an edge barrier.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.