Differential pressure measuring transducer assembly
US4364276A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 16, 1980 |
| Grant date | Dec 21, 1982 |
| Priority date | — |
| Expiry date | Dec 16, 2000 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/0645
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A differential pressure measuring transducer assembly including a measuring diaphragm formed of semiconductor material having gauge resistance elements on one surface thereof and a central boss area of large thickness and a peripheral support flange on the other surface thereof defining therebetween an annular portion of small thickness. The measuring diaphragm is attached at the peripheral support flange to a glass support member and a metallic support member formed with pressure conducting bores respectively communicating with each other. The metallic support member is formed of material having a Young's modulus substantially equal to that of the measuring diaphragm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.