Apparatus for forming organic polymer thin films utilizing microwave induced plasmas
US4365587A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 24, 1980 |
| Grant date | Dec 28, 1982 |
| Priority date | — |
| Expiry date | Mar 24, 2000 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01J2219/0894
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
An apparatus for forming a thin organic film on a substrate which includes a reaction chamber for receiving a substrate on which a thin organic film is to be formed; a microwave discharge tube for supplying the reaction chamber with a carrier gas activated by microwave discharge; a microwave-generating mechanism provided with a hollow resonator for a microwave discharge; and a mechanism for supplying a carrier gas to the microwave discharge tube and a mechanism for supplying the reaction chamber with an organic compound monomer to be polymerized. That region of the microwave discharge tube where a plasma is produced by discharge does not extend to the reaction chamber, but is completely separated therefrom.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.