Fabrication technique for junction devices

US4370359A · kind A · utility

Assignee

• Bell Telephone Laboratories, Inc. · US

Inventors

• Linus Albert Fetter · Morganville, US
• Richard E. Howard · Pleasanton, US
• Evelyn L. Hu · Cambridge, US
• Lawrence David Jackel · Holmdel, US

Key dates

• Filing date: Aug 18, 1980
• Grant date: Jan 25, 1983
• Expiry date: Aug 18, 2000

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10N60/0912

Abstract

A self-aligning technique is used to produce small area junctions such as small area Josephson junctions. A base layer having a thickness corresponding to one dimension of the junction is first deposited. An insulating material is then deposited from a source positioned so that the base layer itself masks its edge from the insulator being formed. This procedure coats the base layer with an insulator, but leaves an edge of this layer free of insulation. A junction is then completed on this uncoated edge.