Ni-fe thin-film temperature sensor
US4371861A · kind A · utility
50Cited by
4References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 11, 1980 |
| Grant date | Feb 1, 1983 |
| Priority date | — |
| Expiry date | Dec 11, 2000 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01K7/183
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A permalloy thin film temperature sensing element in which the NiFe film material is deposited on a substrate in very narrow lines less than about 15 .mu.m wide and in film thicknesses in excess of about 400A.degree. preferably in the range of 1600.degree.-3200A.degree..
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.