Method of producing a multilayer anti-reflection coating
US4372987A · kind A · utility
13Cited by
2References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 9, 1981 |
| Grant date | Feb 8, 1983 |
| Priority date | — |
| Expiry date | Mar 9, 2001 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03C2218/152
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A method of producing a multilayer anti-reflection coating with an interference effect for optical purposes, and optical bodies with a multilayer anti-reflection coating is described, of which at least one layer has a low refractive index, at least one other layer has a medium refractive index, and--if necessary--other layers have a high refractive index, and whereby the layer of medium refractive value is produced by depositing a mixture of tantalic oxide and aluminum oxide by means of an electron gun in a vacuum in a reactive atmosphere.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.