Mask positioning carriage assembly
US4373470A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Feb 9, 1981 |
| Grant date | Feb 15, 1983 |
| Priority date | — |
| Expiry date | Feb 9, 2001 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/042
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A carriage assembly for positioning a selected mask from a plurality of masks between a substrate and a source wherein an elongated mask support means having an elongated mask supporting frame and including means for defining elements for guiding and supporting the elongated mask supporting frame, a plurality of apertures formed in the elongated mask supporting frame and which extends from the upper surface to the lower surface and wherein each aperture has a predetermined diameter and a preselected spacing between the centers thereof and which support a plurality of masks therein, a support roller having a bearing surface for engaging, guiding and dynamically supporting the elongated mask supporting frame through the guiding and supporting elements; a pair of central guide rollers each of which have an outer grooved recessed receiving surface for engaging, guiding and dynamically supporting the elongated mask supporting frame through the guiding and supporting elements and a loaded clamping roller having an outer side wall bearing surface for engaging and dynamically clamping the elongated mask supporting frame and which is in parallel alignment with the axis of the central guide …
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.