Mass flow/pressure control system
US4373549A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 12, 1979 |
| Grant date | Feb 15, 1983 |
| Priority date | — |
| Expiry date | Feb 12, 1999 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/8326
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An input valve having an input that can be coupled to a source of pressurized gas is open during first portions of successive cycles and closed during the remainder. A volume V is connected between the output of the valve and a load, and gas flows through the volume V to a load during the entire cycle. Pressure in the volume V is measured at the end of the first portion of each cycle and/or at the end of each cycle, and means responsive to a pressure can be used to control the flow of gas through the input valve so as to maintain the pressure on the load at a predetermined value or the difference in the pressures can be used to maintain a constant flow to the load. An output valve can be inserted between the volume and the load and closed while pressure measurements are being made so that the pressure is constant during the measurement. In one embodiment, a reserve volume can be coupled to the output valve and a third valve can be coupled between the reserve volume and the load so as to smooth out variations in pressure on the load. In this last embodiment, the output and third valves are operated out of phase and in such manner that the input valve and output valve are closed when…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.