Etchant composition and use thereof
US4376057A · kind A · utility
7Cited by
8References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 26, 1980 |
| Grant date | Mar 8, 1983 |
| Priority date | — |
| Expiry date | Nov 26, 2000 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/32134
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
An aqueous acidic composition suitable for etching containing an acid and polyvinyl alcohol and use thereof.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.