Projection aligner with bending mirror
US4376580A · kind A · utility
5Cited by
9References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 2, 1981 |
| Grant date | Mar 15, 1983 |
| Priority date | — |
| Expiry date | Mar 2, 2001 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F9/70
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A projection aligner is provided wherein the image position can be shifted by employing a bending mirror which makes a slight change in the magnification.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.