Process for producing vacuum deposition films
US4377607A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 1, 1981 |
| Grant date | Mar 22, 1983 |
| Priority date | — |
| Expiry date | May 1, 2001 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/14
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
In a process for producing vacuum deposition films which comprises providing a vacuum deposition film composed of an alloy or an intermetallic compound of two or more components having different vapor pressures at a specified temperature on a base, the improvement which comprises charging the component having the lower vapor pressure at said temperature to an evaporation source in a vacuum evaporation chamber in such an amount that the evaporation amount thereof per unit time does not substantially vary, and carrying out vacuum evaporation while continuously feeding a component having a higher vapor pressure at said temperature into said evaporation source in an amount corresponding to the evaporation amount thereof per unit time.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.