Miniaturized accelerometer with piezoelectric FET
US4378510A · kind A · utility
19Cited by
11References
2Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 17, 1980 |
| Grant date | Mar 29, 1983 |
| Priority date | — |
| Expiry date | Jul 17, 2000 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/124
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An accelerometer comprising a piezoelectric device hard mounted to the gate electrode of a field effect transistor, thus avoiding the capacitance of an interconnecting coaxial cable connection and providing, therefore, improved frequency response in a smaller, more efficient package.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.