Vibrating beam rotation sensor
US4381672A · kind A · utility
88Cited by
8References
43Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 4, 1981 |
| Grant date | May 3, 1983 |
| Priority date | — |
| Expiry date | Mar 4, 2001 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5719
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A rotation sensor having a vibrating cantilever beam is disclosed herein. The sensor comprises an integral single crystal silicon cantilever beam and support structure, an oscillator circuit for generating an electrical signal vibrating the cantilever beam at or near its natural resonant frequency and a piezoresistive element formed at the base of the base of the vibrating beam. The piezoresistive element is only sensitive to the stresses induced in the beam due to the rotation of the beam about an axis parallel to its length.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.