Micro fabrication molding process
US4381963A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 30, 1980 |
| Grant date | May 3, 1983 |
| Priority date | — |
| Expiry date | Jul 30, 2000 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49893
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
Identical half-section shells of microscopic size, such as hemispherical shells from which spherical laser fusion targets can be made are capable of mass production by micro fabrication molding techniques. A body (preferably a hollow glass microsphere which is called a glass microballoon) provides a pattern for the hemispherical shells, and is used to produce an original mold section. One or more master molds are formed from this original mold section by replication. Many identical replica molds are made by casting soluble material onto the master mold and removing them therefrom. The replica molds are coated with one or more layers which will form the hemispherical shell wall. The material coating the flat background around the hemispherical cavity is referred to as the flange and is removed to form free standing shells. In order to remove the flange material, the coated replica molds are overcoated with a soluble material which is etched away to the level of the flange. The remaining soluble material acts as a mask for the shell material when the flange material is etched away. The replica mold and overcoating body remain as a protective mask and are dissolved away to release the…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.