Process and apparatus for converged fine line electron beam treatment of objects
US4382186A · kind A · utility
64Cited by
3References
37Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 12, 1981 |
| Grant date | May 3, 1983 |
| Priority date | — |
| Expiry date | Jan 12, 2001 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S117/905
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
This disclosure is concerned with the use of fine line converged electron beams of high aspect ratio for effecting physical, chemical, mechanical and other changes in the surface of objects, and also volume effects, including applications, for example, to semiconductor and other materials surface modification technology, annealing, welding, etching, polishing, cutting, curing and other surface and volume alteration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.