Patent · US Expired

Method of laser enhanced thermal diffusion

US4382978A · kind A · utility

8Cited by
1References
12Claims
0Family size

Assignee

Inventor

Key dates

Filing dateNov 24, 1980
Grant dateMay 10, 1983
Priority date
Expiry dateNov 24, 2000

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB23K28/02
  • WIPO fieldMachine tools
  • WIPO sectorMechanical engineering

Abstract

There is disclosed a method by which a three-dimensional horn structure at the end of a channel waveguide in a dielectric chip is produced to facilitate coupling of a fiber optic waveguide by butt coupling techniques. The three-dimensional horn structure is fabricated by localized surface diffusion resulting from superposing a CO.sub.2 laser heating beam on the desired enlarged area while diffusion of the waveguide is taking place or after it has taken place in a controlled ambient furnace atmosphere.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.