Alignment system
US4385434A · kind A · utility
23Cited by
2References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 8, 1981 |
| Grant date | May 31, 1983 |
| Priority date | — |
| Expiry date | Jun 8, 2001 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/53961
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
An alignment system for realigning one portion of an integrated circuit wafer relative to another portion of the same wafer including: a support member for mounting a wafer to be realigned and having a plurality of laterally disposed zones; and means for selectively, laterally deforming the zones of the support member for realigning corresponding portions of a wafer mounted on the support member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.