Method of producing solid-state color imaging devices
US4387987A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 22, 1981 |
| Grant date | Jun 14, 1983 |
| Priority date | — |
| Expiry date | May 22, 2001 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F39/8053
Abstract
In a solid-state imaging device wherein filters of the three primary colors in the mosaic filter configuration are stacked on a solid-state imager LSI in which a plurality of picture elements each consisting of a photoelectric conversion element and a scanning element are arrayed in the shape of a matrix; a method of producing a solid-state imaging device wherein the dimensions of filter layout patterns on exposure masks for the respective colors used in case of manufacturing the color filters of: EQU T.sub.R <T.sub.B <T.sub.G where T.sub.R denotes the thickness of the red filter, T.sub.G that of the green filter and T.sub.B that of the blue filter, are smaller than the dimensions of the picture elements, and especially, the dimensions of the filter layout patterns on the exposure mask for manufacturing the green filters are the smallest.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.