Aluminum wire ball bonding apparatus and method
US4388512A · kind A · utility
9Cited by
4References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 9, 1981 |
| Grant date | Jun 14, 1983 |
| Priority date | — |
| Expiry date | Mar 9, 2001 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/19043
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method and apparatus for forming a spherical shape on the end of an aluminum wire using a relatively low voltage across an arc gap to heat the end. Because the voltage is below the minimum sparking potential, a high voltage impulse is superimposed on the electrode to ionize the gas therebetween and initiate the arc. The gap may be in a protective environment such as an inert gas to prevent the formation of additional oxide. The wire may then be used in an aluminum ball bond.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.