Filament dispenser cathode
US4388560A · kind A · utility
23Cited by
1References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 26, 1981 |
| Grant date | Jun 14, 1983 |
| Priority date | — |
| Expiry date | May 26, 2001 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/08
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Thermionic cathode 12 for a plasma ion source 10 has tungsten wire 64 advanced by wheels 56 from supply 50 to take-up spool 58. In chamber 48, the active cathode region 64 acts with anode 16 to supply electrons for ionizing a fuel gas so the ions are discharged from slit 18 for acceleration, separation and implantation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.