Boat for carrying semiconductor substrates
US4389967A · kind A · utility
13Cited by
5References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 11, 1981 |
| Grant date | Jun 28, 1983 |
| Priority date | — |
| Expiry date | Jan 11, 2001 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B31/103
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
In a boat with wheels for carrying semiconductor substrates, the friction surfaces of the wheel systems are coated with a silicon nitride film to prevent seizure from occurring during a diffusion, oxidation or annealing process for semiconductor substrates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.