Process for producing SF.sub.6 through SF.sub.5 Cl
US4390511A · kind A · utility
5Cited by
2References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 27, 1981 |
| Grant date | Jun 28, 1983 |
| Priority date | — |
| Expiry date | Jul 27, 2001 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01B17/453
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
SF.sub.6 is produced by a pyrolysis of SF.sub.5 Cl obtained by a reaction of sulfur or sulfur chloride with chlorine and an amine/hydrogen fluoride complex or a reaction of sulfur tetrafluoride with chlorine and an amine/hydrogen fluoride complex.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.