Workpiece positioning table with air bearing pads
US4392642A · kind A · utility
62Cited by
5References
4Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 22, 1980 |
| Grant date | Jul 12, 1983 |
| Priority date | — |
| Expiry date | Dec 22, 2000 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16C2322/39
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
Air bearing pads for supporting a one-axis table in a granite bridge positioning apparatus on a thin film of air include machine-thinned sections for providing resilience to the pads in order to permit flexing sufficient to accommodate surface irregularities on the supporting surface. A single air pressure regulator provides a source of pressurized air to flow-control devices of a plurality of air bearing pads supporting a one-axis table. The individual flow-control devices adjust the flow of air to their respective air bearing pads to individually adjust the lift of the pads.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.