Gas discharge laser having a buffer gas of neon
US4393505A · kind A · utility
58Cited by
2References
4Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 3, 1981 |
| Grant date | Jul 12, 1983 |
| Priority date | — |
| Expiry date | Nov 3, 2001 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/225
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The output power and efficiency of a gas discharge laser is substantially improved by the substitution of neon (Ne) for helium (He) as a buffer in the lasing medium. One embodiment of the invention is a pulsed excimer laser having a lasing gas comprising a mixture of krypton (Kr) and fluorine (F.sub.2). Use of Ne with the KrF excimer lasing medium further enables advantageous utilization of corona wire pre-ionization to initiate the main discharge of this type of laser.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.