Selective etching of phosphosilicate glass
US4395304A · kind A · utility
29Cited by
4References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 11, 1982 |
| Grant date | Jul 26, 1983 |
| Priority date | — |
| Expiry date | May 11, 2002 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/978
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A selective chemical etchant solution for phosphosilicate glass includes a carboxylic acid, hydrogen fluoride and water. The invention is also a method for preferentially etching the phosphosilicate glass which comprises the step of immersing the glasses in the etchant solution of the invention.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.