Stable liquid polymeric precursor to silicon nitride and process
US4397828A · kind A · utility
58Cited by
2References
6Claims
0Family size
Assignee
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Key dates
| Filing date | Nov 16, 1981 |
| Grant date | Aug 9, 1983 |
| Priority date | — |
| Expiry date | Nov 16, 2001 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01B21/087
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Stable, viscous polymers of silicon, nitrogen and hydrogen are formed by reacting a halosilane with ammonia in the presence of a solvent comprising an aliphatic ether, a chloromethane or mixtures thereof. After the solvent has been removed from the reaction product, the polymer can be poured into a container of desired shape and then can be sintered to form a uniform silicon nitride product.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.