Stripping compositions and methods of stripping resists
US4401747A · kind A · utility
32Cited by
6References
32Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 2, 1982 |
| Grant date | Aug 30, 1983 |
| Priority date | — |
| Expiry date | Sep 2, 2002 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/425
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Stripping compositions for removing resist materials from substrates comprise compositions of a 2-pyrrolidinone compound and a dialkyl sulfone compound. Either or both of polyethylene glycol and a diethylene glycol monoalkyl ether may be added to provide even more effective stripping compositions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.