Stripping compositions and methods of stripping resists
US4401748A · kind A · utility
23Cited by
4References
32Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 7, 1982 |
| Grant date | Aug 30, 1983 |
| Priority date | — |
| Expiry date | Sep 7, 2002 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC11D7/3281
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
Stripping compositions for removing resist materials from substrates comprise compositions of a 2-pyrrolidinone compound and tetrahydrofuran compound. Either or both of polyethylene glycol and a diethylene glycol monoalkyl ether may be added to provide even more effective stripping compositions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.