Surface inspection system
US4402613A · kind A · utility
29Cited by
10References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 29, 1979 |
| Grant date | Sep 6, 1983 |
| Priority date | — |
| Expiry date | Mar 29, 1999 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/137
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A surface inspection system utilizes a laser light source, and a vacuum chuck to support the material whose surface is to be inspected. The vacuum chuck is rotatable. The laser beam may be translated across the work surface while the chuck is rotated, all the while maintaining mutual perpendicularity of the vacuum chuck work surface and the laser beam. An airtrack transports the material whose surface is to be inspected. Sensors are utilized to detect the position of such material along the track and to guide the system in its operation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.