Stripping compositions and methods of stripping resists
US4403029A · kind A · utility
38Cited by
2References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 2, 1982 |
| Grant date | Sep 6, 1983 |
| Priority date | — |
| Expiry date | Sep 2, 2002 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/425
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Stripping compositions for removing resist materials from substrates comprise compositions of dimethylacetamide or dimethylformamide or a mixture thereof and a tetrahydrothiophene 1,1-dioxide compound. Either or both of polyethylene glycol and a diethylene glycol monoalkyl ether may be added to provide even more effective stripping compositions
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.